Controlled sealing of nanopores using an easily fabricated...

Microelectronic Engineering 2015 / 08 Vol. 144

Controlled sealing of nanopores using an easily fabricated silicon platform combining in situ optical and electrical monitoring

Marchand, Raphaël, Carcenac, Franck, Malaquin, Laurent, Trévisiol, Emmanuelle, Vieu, Christophe, Thibault, Christophe
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Volume:
144
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.03.032
Date:
August, 2015
File:
PDF, 800 KB
english, 2015
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