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Dewetting of the residual layer of annealed nanoimprinted polystyrene films
Rognin, E., Landis, S., Davoust, L.Volume:
141
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.03.063
Date:
June, 2015
File:
PDF, 1.12 MB
english, 2015