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High-speed replication of light-extraction structure with thermal roller nanoimprinting
Takahashi, K., Nagato, K., Hamaguchi, T., Nakao, M.Volume:
141
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.03.069
Date:
June, 2015
File:
PDF, 1.08 MB
english, 2015