![](/img/cover-not-exists.png)
Characterization of Parylene C as protective layer on micro-piezoelectric printheads
Lu, Bolin, Yin, Zhifu, Zou, Helin, Zhi, Lisha, Feng, JianboVolume:
40
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.07.037
Date:
December, 2015
File:
PDF, 1.80 MB
english, 2015