Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2015 / 04 Vol. 349
Elastic properties of sub-stoichiometric nitrogen ion implanted silicon
Sarmanova, M.F., Karl, H., Mändl, S., Hirsch, D., Mayr, S.G., Rauschenbach, B.Volume:
349
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2015.02.073
Date:
April, 2015
File:
PDF, 1.03 MB
english, 2015