Effect of O2/Ar flow ratio and post-deposition annealing on the structural, optical and electrical characteristics of SrTiO3 thin films deposited by RF sputtering at room temperature
Goldenberg, E., Bayrak, T., Ozgit-Akgun, C., Haider, A., Leghari, S.A., Kumar, M., Biyikli, N.Volume:
590
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.07.060
Date:
September, 2015
File:
PDF, 928 KB
english, 2015