[AIP CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology - Austin, Texas (USA) (24-28 March 2003)] AIP Conference Proceedings - Characterization of Missing-poly Defects in Ion Implantation in ULSI Manufacturing
Dunham, BrianVolume:
683
Year:
2003
DOI:
10.1063/1.1622482
File:
PDF, 633 KB
2003