[AIP PHYSICS OF SEMICONDUCTORS: 27th International Conference on the Physics of Semiconductors - ICPS-27 - Flagstaff, Arizona (USA) (26-30 July 2004)] AIP Conference Proceedings - A Study of the Effect of the Hydrogen Gas Flow on the Quality of Thin CVD Diamond Films Deposited on Silicon Substrates in CH4/H2 Gas Mixture
Bataineh, MohannadVolume:
772
Year:
2005
Language:
english
DOI:
10.1063/1.1994020
File:
PDF, 93 KB
english, 2005