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[AIP CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005 - Richardson, Texas (USA) (15-18 March 2005)] AIP Conference Proceedings - 2-D Temperature Mapping in Fluorocarbon Plasmas
Steffens, Kristen L.Volume:
788
Year:
2005
Language:
english
DOI:
10.1063/1.2062985
File:
PDF, 1.51 MB
english, 2005