![](/img/cover-not-exists.png)
[AIP SYNCHROTRON RADIATION INSTRUMENTATION: Ninth International Conference on Synchrotron Radiation Instrumentation - Daegu (Korea) (28 May-2 June 2006)] AIP Conference Proceedings - Preliminary Hard X-ray Micro-spectroscopic Investigations on Thin-Film Ta-and-W Based Diffusion Barriers for Copper Interconnect Technology
Ablett, James M., Woicik, Joseph C., Tokei, ZsoltVolume:
879
Year:
2007
Language:
english
DOI:
10.1063/1.2436362
File:
PDF, 275 KB
english, 2007