[AIP SYNCHROTRON RADIATION INSTRUMENTATION: Ninth International Conference on Synchrotron Radiation Instrumentation - Daegu (Korea) (28 May-2 June 2006)] AIP Conference Proceedings - A Two Magnetron Sputter Deposition Chamber Equipped with an Additional Ion Gun for in situ Observation of Thin Film Growth and Surface Modification by Synchrotron Radiation Scattering
Schell, Norbert, von Borany, Johannes, Hauser, JensVolume:
879
Year:
2007
Language:
english
DOI:
10.1063/1.2436422
File:
PDF, 406 KB
english, 2007