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[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Real-Time, High Resolution, Dynamic Surface Charge Wafer Mapping for Advanced Ion Implant Process Control
Gurcan, Kendra, Bertuch, Adam, Steeples, Kenneth, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799353
File:
PDF, 2.01 MB
english, 2007