[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - In Situ Monitoring of Hafnium Oxide Atomic Layer Deposition
Maslar, J. E., Hurst, W. S., Burgess, D. R., Kimes, W. A., Nguyen, N. V., Moore, E. F., Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., SeculVolume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799355
File:
PDF, 368 KB
english, 2007