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[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Use of Drop-on-Demand Inkjet Printing Technology to Produce Trace Metal Contamination Standards For the Semiconductor Industry
Windsor, Eric, Fahey, Albert, Gillen, Greg, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799360
File:
PDF, 425 KB
english, 2007