[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Spectroscopic Studies of Band Edge Electronic States in Elemental High-k Oxide Dielectrics on Si and Ge Substrates
Lucovsky, G., Seo, H., Fleming, L. B., Ulrich, M. D., Lüning, J., Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799390
File:
PDF, 2.02 MB
english, 2007