[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications
Patrick, Heather J., Germer, Thomas A., Cresswell, Michael W., Allen, Richard A., Dixson, Ronald G., Bishop, Michael, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, DVolume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799404
File:
PDF, 575 KB
english, 2007