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[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Automated Metrology for SEM Calibration and CD Line Measurements Using Image Analysis and SEM Modeling Methods
Khvatkov, Vitali, Alievski, Vasily, Kadushnikov, Radi, Babin, Sergey, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799411
File:
PDF, 1024 KB
english, 2007