[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS:...

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[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Enhancement Of Infrared Spectroscopy Capabilities For Nanoelectronic And Nanotechnology Applications

Rochat, N., Loup, V., Besson, P., Oillic, C., Mur, P., Demas, A. C., Gergaud, P., Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Eri
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Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799441
File:
PDF, 698 KB
english, 2007
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