[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Investigation of Apertureless NSOM for Measurement of Stress in Strained Silicon-on-Insulator Test Structures
McDonough, Colin, Atesang, Jacob, Wang, Yunfei, Geer, Robert E., Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799444
File:
PDF, 1.07 MB
english, 2007