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[AIP WORLD CONGRESS ON ENGINEERING AND COMPUTER SCIENCE - San Francisco (California) (24–26 October 2007)] AIP Conference Proceedings - Two-stage Atomic Layer Deposition: Deposition of Aluminum Oxide Films on Hydrophilic and Hydrophobic Surfaces
Kobayashi, Nobuhiko P., Williams, R. Stanley, Ao, Sio-Iong, Amouzegar, Mahyar A., Chen, Su-ShingVolume:
1007
Year:
2008
Language:
english
DOI:
10.1063/1.2937616
File:
PDF, 1.18 MB
english, 2008