[AIP RARIFIED GAS DYNAMICS: Proceedings of the 26th...

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[AIP RARIFIED GAS DYNAMICS: Proceedings of the 26th International Symposium on Rarified Gas Dynamics - Kyoto (Japan) (20–25 July 2008)] AIP Conference Proceedings - A Study on the Pumping Performance of a Helical-type Molecular Drag Pump

Kim, Do-Haeng, Kwon, Myoung-Keun, Hwang, Young-Kyu, Abe, Takashi
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Year:
2008
DOI:
10.1063/1.3076453
File:
PDF, 1.94 MB
2008
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