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[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - EBSD Analysis of Narrow Damascene Copper Lines
Geiss, Roy H., Read, David T., Alers, Glenn B., Graham, Rebekah L., Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.Year:
2009
Language:
english
DOI:
10.1063/1.3251212
File:
PDF, 3.53 MB
english, 2009