[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR...

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[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - X-ray Scattering Methods for Porosity Metrology of Low-k Thin Films

Settens, C. M., Kamineni, V. K., Antonelli, G. A., Grill, A., Diebold, A. C., Matyi, R. J., Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Die
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Year:
2009
Language:
english
DOI:
10.1063/1.3251214
File:
PDF, 745 KB
english, 2009
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