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[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Spectroscopic Ellipsometry of Porous Low-κ Dielectric Thin Films

Kamineni, V. K., Settens, C. M., Grill, A., Antonelli, G. A., Matyi, R. J., Diebold, A. C., Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Die
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Year:
2009
Language:
english
DOI:
10.1063/1.3251215
File:
PDF, 702 KB
english, 2009
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