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[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Enhanced TEM Sample Preparation Using In-situ Low Energy Argon Ion Milling
Stegmann, Heiko, Ritz, Yvonne, Utess, Dirk, Hübner, René, Zschech, Ehrenfried, Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, AlainYear:
2009
Language:
english
DOI:
10.1063/1.3251233
File:
PDF, 3.23 MB
english, 2009