[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Correction of Hysteresis in SPM Images by a Moving Window Correlation Method
Fu, Joseph, Chu, Wei, Dixson, Ronald, Orji, George, Vorburger, Theodore, Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.Year:
2009
Language:
english
DOI:
10.1063/1.3251234
File:
PDF, 1.13 MB
english, 2009