[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Detection of Metal Contamination on Silicon Wafer Backside and Edge by New TXRF Methods
Kohno, Hiroshi, Yamagami, Motoyuki, Formica, Joseph, Shen, Liyong, Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.Year:
2009
Language:
english
DOI:
10.1063/1.3251262
File:
PDF, 1.23 MB
english, 2009