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[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Vacuum-Ultraviolet Reflectometry of Ultra-thin HfO[sub 2] Films
Hurst, Jeffrey, Vartanian, Victor, Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.Year:
2009
Language:
english
DOI:
10.1063/1.3251263
File:
PDF, 211 KB
english, 2009