[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR...

  • Main
  • [AIP FRONTIERS OF CHARACTERIZATION AND...

[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Vacuum-Ultraviolet Reflectometry of Ultra-thin HfO[sub 2] Films

Hurst, Jeffrey, Vartanian, Victor, Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2009
Language:
english
DOI:
10.1063/1.3251263
File:
PDF, 211 KB
english, 2009
Conversion to is in progress
Conversion to is failed