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AIP Conference Proceedings [AIP REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION VOLUME 29 - Kingston (Rhode Island) (26–31 July 2009)] - CHARACTERIZATION OF SILICON WAFER SURFACES AFTER HYDROPHILIC AND HYDROPHOBIC TREATMENTS BY ATOMIC FORCE MICROSCOPY
Xi, Xiaoning, Shi, Jinjie, Maghsoudy-Louyeh, Sahar, Tittmann, Bernhard R., Thompson, Donald O., Chimenti, Dale E.Year:
2010
Language:
english
DOI:
10.1063/1.3362245
File:
PDF, 267 KB
english, 2010