AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY...

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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - Cluster Ion Implantation for Process Application -Carbon Cluster co-Implantation-

Tanjyo, M., Nagayama, T., Onoda, H., Hamamoto, N., Umisedo, S., Koga, Y., Une, H., Maehara, N., Kawamura, Y., Hashino, Y., Nakashima, Y., Hashimoto, M., Tokoro, N., Nagai, N., Sekar, K., Krull, W., Ma
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Year:
2011
Language:
english
DOI:
10.1063/1.3548322
File:
PDF, 395 KB
english, 2011
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