![](/img/cover-not-exists.png)
AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - Ribbon and Spot Beam Process Performance of the Dual Mode iPulsar High Current Ion Implanter
Kopalidis, Peter M., Wan, Zhimin, Collart, Erik, Matsuo, Jiro, Kase, Masataka, Aoki, Takaaki, Seki, ToshioYear:
2011
Language:
english
DOI:
10.1063/1.3548414
File:
PDF, 640 KB
english, 2011