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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - N- and P-Type Cluster Source
Horsky, Thomas N., Hahto, Sami K., McIntyre, Edward K., Sacco, George P., Matsuo, Jiro, Kase, Masataka, Aoki, Takaaki, Seki, ToshioYear:
2011
Language:
english
DOI:
10.1063/1.3548447
File:
PDF, 2.19 MB
english, 2011