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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - Suppression of Divergence of Low Energy Ion Beams by Space Charge Neutralization with Low Energy Electrons Emitted from Field Emitter Arrays
Ishikawa, Junzo, Gotoh, Yasuhito, Takeuchi, Mitsuaki, Taguchi, Shuhei, Nicolaescu, Dan, Tsuji, Hiroshi, Kimoto, Tsunenobu, Sakai, Shigeki, Matsuo, Jiro, Kase, Masataka, Aoki, Takaaki, Seki, ToshioYear:
2011
Language:
english
DOI:
10.1063/1.3548461
File:
PDF, 192 KB
english, 2011