AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY...

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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - Mass Filtering Function of Magnetic Boundaries in Multi-Cusp Ion Source

Inouchi, Yutaka, Dohi, Shojiro, Tanii, Masahiro, Konishi, Masashi, Naito, Masao, Matsuo, Jiro, Kase, Masataka, Aoki, Takaaki, Seki, Toshio
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Year:
2011
Language:
english
DOI:
10.1063/1.3548463
File:
PDF, 710 KB
english, 2011
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