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AIP Conference Proceedings [AIP INTERNATIONAL CONFERENCE ON ADVANCES IN MATERIALS AND PROCESSING TECHNOLOGIES (AMPT2010) - Paris, (France) (24–27 October 2010)] - Simulation of Nanoscale Orthogonal Cutting of Single-Crystal Silicon
Lin, Zone-Ching, Peng, Shih-Shuan, Wang, Ren-Yuan, Chinesta, Francisco, Chastel, Yvan, El Mansori, MohamedYear:
2011
Language:
english
DOI:
10.1063/1.3552362
File:
PDF, 204 KB
english, 2011