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AIP Conference Proceedings [AIP APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: Twenty-First International Conference - Fort Worth, Texas, (USA) (8–13 August 2010)] - Semiconductor Ion Implanters
MacKinnon, Barry A., Ruffell, John P., McDaniel, Floyd D., Doyle, Barney L.Year:
2011
Language:
english
DOI:
10.1063/1.3586054
File:
PDF, 1.17 MB
english, 2011