AIP Conference Proceedings [AIP SECOND INTERNATIONAL SYMPOSIUM ON NEGATIVE IONS, BEAMS AND SOURCES - Takayama City, (Japan) (16–19 November 2010)] - Improvement of Plasma Production for Large Area Multi-antenna RF Ion Source
Oka, Y., Shoji, T., Takeiri, Yasuhiko, Tsumori, KatsuyoshiYear:
2011
Language:
english
DOI:
10.1063/1.3637403
File:
PDF, 292 KB
english, 2011