![](/img/cover-not-exists.png)
AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - SiC Epitaxial Layer Resistivity Monitoring; A look at Existing and Novel Electrical Methods
Hillard, Robert J., Tsidilkovski, Edward, Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, Amal, Secula, Erik M.Year:
2011
Language:
english
DOI:
10.1063/1.3657883
File:
PDF, 231 KB
english, 2011