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AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - UV-Photoreflectance and Raman Characterization of Strain Relaxation in Si on Silicon-Germanium Films

Current, Michael, Chism, Will, Yoo, Woo Sik, Vartanian, Victor, Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, Amal, Secula, Erik M.
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Year:
2011
Language:
english
DOI:
10.1063/1.3657884
File:
PDF, 518 KB
english, 2011
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