AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - Reliability Testing of Advanced Interconnect Materials
Keller, R. R., Strus, M. C., Chiaramonti, A. N., Kim, Y. L., Jung, Y. J., Read, D. T., Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, Amal, Secula, Erik M.Year:
2011
Language:
english
DOI:
10.1063/1.3657900
File:
PDF, 456 KB
english, 2011
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