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AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - Measurement of Nanograin Orientations: Application to Cu Interconnects
Brunetti, G., Galand, R., Rouvière, J. L., Clément, L., Cayron, C., Rauch, E. F., Robert, D., Martin, J. F., Bertin, F., Chabli, A., Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, AmYear:
2011
Language:
english
DOI:
10.1063/1.3657901
File:
PDF, 1.47 MB
english, 2011