![](/img/cover-not-exists.png)
AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - Hybrid Metrology & 3D-AFM Enhancement for CD Metrology Dedicated to 28 nm Node and Below Requirements
Foucher, J., Faurie, P., Dourthe, L., Irmer, B., Penzkofer, C., Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, Amal, Secula, Erik M.Year:
2011
Language:
english
DOI:
10.1063/1.3657905
File:
PDF, 1.00 MB
english, 2011