AIP Conference Proceedings [AIP FRONTIERS OF...

  • Main
  • AIP Conference Proceedings [AIP...

AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - Hybrid Metrology & 3D-AFM Enhancement for CD Metrology Dedicated to 28 nm Node and Below Requirements

Foucher, J., Faurie, P., Dourthe, L., Irmer, B., Penzkofer, C., Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, Amal, Secula, Erik M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2011
Language:
english
DOI:
10.1063/1.3657905
File:
PDF, 1.00 MB
english, 2011
Conversion to is in progress
Conversion to is failed