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AIP Conference Proceedings [AIP 2ND ASEAN - APCTP WORKSHOP ON ADVANCED MATERIALS SCIENCE AND NANOTECHNOLOGY: (AMSN 2010) - Penang, Malaysia (21–23 December 2010)] - Subnanometer poly-silicon gap structure formation: Comparison study between size expansion and size reduction
Hashim, U., Nazwa, T., Dhahi, Th. S.Year:
2012
Language:
english
DOI:
10.1063/1.4732469
File:
PDF, 589 KB
english, 2012