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AIP Conference Proceedings [AIP 2ND ASEAN - APCTP WORKSHOP ON ADVANCED MATERIALS SCIENCE AND NANOTECHNOLOGY: (AMSN 2010) - Penang, Malaysia (21–23 December 2010)] - Formation of 42 nm polysilicon nanogap structure by using size expansion technique
Nazwa, T., Hashim, U., Dhahi, Th. S., Mohamad, S. N.Year:
2012
Language:
english
DOI:
10.1063/1.4732501
File:
PDF, 992 KB
english, 2012