Detecting response of microelectromechanical resonators by microwave reflectometry
Legrand, B., Ducatteau, D., Théron, D., Walter, B., Tanbakuchi, H.Volume:
103
Year:
2013
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4817411
File:
PDF, 504 KB
english, 2013