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Tuning patterning conditions by co-adsorption of gases: Br2 and H2 on Si(001)
Biswas, Sananda, Deshpande, Sadanand V., Dunn, Derren N., Narasimhan, ShobhanaVolume:
139
Year:
2013
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.4828702
File:
PDF, 2.00 MB
english, 2013