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AIP Conference Proceedings [AIP Publishing LLC SOLID STATE PHYSICS: Proceedings of the 58th DAE Solid State Physics Symposium 2013 - Thapar University, Patiala, Punjab, India (17–21 December 2013)] - Deposition and characterization of zirconium nitride (ZrN) thin films by reactive magnetron sputtering with linear gas ion source and bias voltage
Kavitha, A., Subramanian, N. Sankara, Loganathan, S., Kannan, R.Year:
2014
Language:
english
DOI:
10.1063/1.4873084
File:
PDF, 258 KB
english, 2014