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AIP Conference Proceedings [AIP Publishing LLC 7TH INTERNATIONAL CONFERENCE ON LOW DIMENSIONAL STRUCTURES AND DEVICES: (LDSD 2011) - Telchac, Mexico (22–27 May 2011)] - Fabrication and characterization of nanometric SiOx/SiOy multilayer structures obtained by LPCVD
Román-López, S., Aceves-Mijares, M., Carrillo-López, J., Pedraza-Chávez, J.Year:
2014
Language:
english
DOI:
10.1063/1.4878276
File:
PDF, 384 KB
english, 2014