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Electron energy distributions and electron impact source functions in Ar/N2 inductively coupled plasmas using pulsed power
Logue, Michael D., Kushner, Mark J.Volume:
117
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4904935
Date:
January, 2015
File:
PDF, 5.13 MB
english, 2015