Sensitivity of CoSi2 precipitation in silicon to extra-low...

Journal of Applied Physics 2015 / 01 Vol. 117; Iss. 4

Sensitivity of CoSi2 precipitation in silicon to extra-low dopant concentrations. I. Experiment

Fortuna, F., Ruault, M.-O., Borodin, V. A., Ganchenkova, M. G., Kaïtasov, O.
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Volume:
117
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4906402
Date:
January, 2015
File:
PDF, 1.81 MB
english, 2015
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